［イベント］第179回オプティクス教育研究セミナー 「Accurate and traceable nanodimensional metrology」を開催します （10/18）

※講演は英語で行われます。

講演者：Dr. Gaoliang Dai (head of the working group "3D nanometrology" Physikalisch-Technische Bundesanstalt ーPTBー)
日時：10月18日（金）15:00～16:00
場所：陽東キャンパス オプティクス教育研究センター センター長室およびオンライン
対象：学外の方の参加も可能です。興味のある皆様のご参加をお待ちしています。

Traceable and accurate nanodimensional metrology plays an essential role in vast industrial applications of nanotechnology, e.g. to make the results of different measurement tools comparable, to allow data fusion and to understand the real size of the fabricated nanostructures. We have summarized various metrology tasks of, e.g., feature width (CD), height, edge profile, sidewall angle (SWA), corner rounding, footing, contour and line edge/width roughness (LER/LWR), into two fundamental categories: a magnification issue and an offset issue. Comprehensive metrology solutions based on two different traceability approaches, referred to as a top-down and a bottom-up approach, have been developed to solve these two metrology issues. The top-down approach is based on the optical interferometry, whose measurement results can be related to the wavelength of the laser source calibrated to the SI unit "Metre". In the bottom-up approach, the measurement is performed using the atom spacing as a physical "ruler". Finally, some selected application examples, for instance, reference metrology for EUV photomask, line edge roughness metrology of a SiC sample, and reference surface metrology are shown, demonstrating significant metrology values and impacts. The research enables various calibration services with unprecedented measurement uncertainties, for instance, U (k=2) of 0.3 nm for feature height calibration, U (k=2) of 15 pm for mean pitch calibration, and U (k=2) of 1.6 nm for CD calibration. As nanotechnologies rapidly evolve, the presentation will finally discuss future prospects, for instance, the application of hybrid metrology, data fusion, and artificial intelligence (AI) for nanometrology.

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https://uu-core.com/event.html

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